Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455424 | Selective cap layers over recessed polysilicon plugs | Steven T. Harshfield | 2002-09-24 |
| 6384480 | Formation of electrical contacts to conductive elements in the fabrication of semiconductor integrated circuits | — | 2002-05-07 |
| 6373137 | Copper interconnect for an integrated circuit and methods for its fabrication | — | 2002-04-16 |
| 6348403 | Suppression of hillock formation in thin aluminum films | Kanwal K. Raina, Tianhong Zhang | 2002-02-19 |
| 6348721 | Reducing reflectivity on a semiconductor wafer by annealing titanium and aluminum | — | 2002-02-19 |
| 6339026 | Semiconductor processing methods of polishing aluminum-comprising layers | — | 2002-01-15 |