Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485273 | Distributed MEMS electrostatic pumping devices | — | 2002-11-26 |
| 6456420 | Microelectromechanical elevating structures | — | 2002-09-24 |
| 6396620 | Electrostatically actuated electromagnetic radiation shutter | — | 2002-05-28 |
| 6373682 | Electrostatically controlled variable capacitor | — | 2002-04-16 |