Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479394 | Method of low-selective etching of dissimilar materials having interfaces at non-perpendicular angles to the etch propagation direction | Dmitri A. Choutov, Alexander Kalnitsky | 2002-11-12 |