Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495475 | Method for fabrication of a high capacitance interpoly dielectric | Mark Good | 2002-12-17 |
| 6489254 | Method of forming pre-metal dielectric film on a semiconductor substrate including first layer of undoped oxide of high ozone:TEOS volume ratio and second layer of low ozone doped BPSG | Michael Whiteman | 2002-12-03 |