Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449428 | Gas driven rotating susceptor for rapid thermal processing (RTP) system | Helmut Aschner, Karsten Weber, Dieter Zernickel | 2002-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449428 | Gas driven rotating susceptor for rapid thermal processing (RTP) system | Helmut Aschner, Karsten Weber, Dieter Zernickel | 2002-09-10 |