Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473187 | High-sensitivity interferometric accelerometer | — | 2002-10-29 |
| 6348295 | Methods for manufacturing electronic and electromechanical elements and devices by thin-film deposition and imaging | Saul Griffith, Joseph M. Jacobson | 2002-02-19 |