Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489611 | Atomic force microscope for profiling high aspect ratio samples | Bernardo D. Aumond | 2002-12-03 |
| 6457864 | Omni-directional high precision friction drive positioning stage | Woo Sok Chang | 2002-10-01 |