Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432780 | Method for suppressing boron penetrating gate dielectric layer by pulsed nitrogen plasma doping | — | 2002-08-13 |
| 6383901 | Method for forming the ultra-shallow junction by using the arsenic plasma | — | 2002-05-07 |
| 6380012 | Boron difluoride plasma doping method for forming ultra-shallow junction | — | 2002-04-30 |