Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451699 | Method and apparatus for planarizing a wafer surface of a semiconductor wafer having an elevated portion extending therefrom | — | 2002-09-17 |
| 6354908 | Method and apparatus for detecting a planarized outer layer of a semiconductor wafer with a confocal optical system | Derryl D. J. Allman, David W. Daniel | 2002-03-12 |