Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383332 | Endpoint detection method and apparatus which utilize a chelating agent to detect a polishing endpoint | Gayle W. Miller | 2002-05-07 |
| 6358819 | Dual gate oxide process for deep submicron ICS | Gayle W. Miller | 2002-03-19 |