Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6481446 | Method of cleaning a polishing pad conditioner and apparatus for performing the same | Min-Soo Yang | 2002-11-19 |
| 6443826 | Polishing head of a chemical mechanical polishing apparatus and, retainer ring of the same | Yun-Sik Yang, Hun Cha, Kyung-Dae Kim | 2002-09-03 |