Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482734 | Diffusion barrier layer for semiconductor device and fabrication method thereof | Hong-Koo Baik, Sung-Man Lee | 2002-11-19 |
| 6429140 | Method of etching of photoresist layer | Dong Hyen Yi, Myung Ho Yim | 2002-08-06 |
| 6372116 | Method of forming a conductive layer and an electroplating apparatus thereof | Do-Heyoung Kim, Jae-Jeong Kim | 2002-04-16 |