Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440281 | Device for the prevention of arcing in vacuum sputtering installations | Johann Sturmer, Michael Lubbehusen | 2002-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440281 | Device for the prevention of arcing in vacuum sputtering installations | Johann Sturmer, Michael Lubbehusen | 2002-08-27 |