Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411389 | Optical monitor for real time thickness change measurements via lateral-translation induced phase-stepping interferometry | — | 2002-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411389 | Optical monitor for real time thickness change measurements via lateral-translation induced phase-stepping interferometry | — | 2002-06-25 |