Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464841 | Cathode having variable magnet configuration | — | 2002-10-15 |
| 6416635 | Method and apparatus for sputter coating with variable target to substrate spacing | Israel A. Wagner | 2002-07-09 |