Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497241 | Hollow core spindle and spin, rinse, and dry module including the same | — | 2002-12-24 |
| 6434775 | Nozzle for rinsing the backside of a semiconductor wafer | — | 2002-08-20 |
| 6415804 | Bowl for processing semiconductor wafers | Brian Bliven | 2002-07-09 |