Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441555 | Plasma excitation coil | Brian McMillin, Frank Y. Lin | 2002-08-27 |
| 6400458 | Interferometric method for endpointing plasma etch processes | — | 2002-06-04 |
AH
Arthur M. Howald
Overall (2002): #73,154 of 266,432Top 30%
2
Patents 2002