Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464867 | Apparatus for producing water containing dissolved ozone | Hiroshi Morita, Osamu Ota, Kazumi Tsukamoto | 2002-10-15 |
| 6450181 | Cleaning solution for electronic materials and method for using same | Hiroshi Morita, Junichi Ida | 2002-09-17 |
| 6409918 | Apparatus for supplying ozonated ultrapure water | Hiroshi Morita, Junichi Ida | 2002-06-25 |
| 6372699 | Cleaning solution for electronic materials and method for using same | Hiroshi Morita, Junichi Ida | 2002-04-16 |
| 6346505 | Cleaning solution for electromaterials and method for using same | Hiroshi Morita, Junichi Ida | 2002-02-12 |