Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6369143 | Polymer for radiation-sensitive resist and resist composition containing the same | Joo-Hyeon Park, Seong Ju Kim, Dong-Chul Seo | 2002-04-09 |
| 6358666 | Chemically amplified resist composition containing norbornane type low molecular additive | Dong-Chul Seo, Joo-Hyeon Park, Seong Ju Kim | 2002-03-19 |