Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417922 | Alignment device and lithographic apparatus comprising such a device | Antonius Maarten Nuijs | 2002-07-09 |
| 6368763 | Method of detecting aberrations of an optical imaging system | Casparus Anthonius Henricus Juffermans | 2002-04-09 |