Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483580 | Spectroscopic scatterometer system | Ibrahim Abdulhalim | 2002-11-19 |
| 6358014 | Composite spinner and method of making the same | Chen-Yu Chou, Gerald Alexander Pauley | 2002-03-19 |