Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6390677 | Fluid bearings and vacuum chucks and methods for producing same | — | 2002-05-21 |
| 6363166 | Automated photomask inspection apparatus | Mark J. Wihl, Tao-Yi Fu, Damon F. Kvamme, Michael E. Fein | 2002-03-26 |