Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6414752 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, David W. Shortt, Daniel Kavaldjiev +1 more | 2002-07-02 |