Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6438449 | Substrate transport apparatus and transport teaching system | Yasuo Kawamatsu, Yoshihiko Watanabe | 2002-08-20 |
| 6371713 | Substrate processing apparatus | Joichi Nishimura, Masami Ohtani | 2002-04-16 |