Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454910 | Ion-assisted magnetron deposition | Harold R. Kaufman, James R. Kahn, Kirk A. Thompson | 2002-09-24 |
| 6456011 | Magnetic field for small closed-drift ion source | Antonina Ivanovna Bugrova, Aleksei Vasilievich Desiatskov, Aleksei Ivanovich Morozov, Vadim Konstantinovich Kharchevnikov, Harold R. Kaufman | 2002-09-24 |