Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6422922 | Workpiece holder for polishing, apparatus for polishing workpiece and method for polishing workpiece | Kouichi Okamura, Fumio Suzuki, Hisashi Masumura, Naotaka Toyama | 2002-07-23 |
| 6386957 | Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus | Hisashi Masumura, Kouichi Tanaka, Fumio Suzuki, Kouichi Okamura, Naotaka Toyama | 2002-05-14 |