Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480807 | Micropattern measuring method and apparatus, and recording medium that records micropattern measuring program | — | 2002-11-12 |
| 6363167 | Method for measuring size of fine pattern | Fumio Komatsu | 2002-03-26 |