Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6335129 | Method for repairing pattern defect, photo mask using the method, and semiconductor device manufacturing method employing the photo mask | Mitsuyo Asano | 2002-01-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6335129 | Method for repairing pattern defect, photo mask using the method, and semiconductor device manufacturing method employing the photo mask | Mitsuyo Asano | 2002-01-01 |