Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455214 | Scanning exposure method detecting focus during relative movement between energy beam and substrate | Shinji Wakamoto, Yuji Imai, Masayoshi Yamazaki | 2002-09-24 |
| 6339704 | Surface acoustic wave device and communication apparatus | — | 2002-01-15 |