Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6381300 | Exposure mask, exposure mask manufacturing method, and semiconductor device manufacturing method using exposure mask | — | 2002-04-30 |
| 6366639 | X-ray mask, method of manufacturing the same, and X-ray exposure method | Kenichi Murooka | 2002-04-02 |