Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383942 | Dry etching method | Hiroshi Sugiura | 2002-05-07 |
| 6376347 | Method of making gate wiring layer over semiconductor substrate | Mitsuhiro Ohmura | 2002-04-23 |
| 6368977 | Semiconductor device manufacturing method | Yukimasa Yoshida, Katsuaki Aoki, Hiroshi Fujita, Takashi O, Toshimitsu Omine +3 more | 2002-04-09 |