Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458203 | System for manufacturing a single-crystal ingot employing czochralski technique, and method of controlling the system | Shigeo Morimoto, Masato Moriya, Toshirou Kotooka | 2002-10-01 |
| 6347521 | Temperature control device and method for manufacturing the same | Kanichi Kadotani, Makio Tsubota, Hironori Akiba | 2002-02-19 |