Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435197 | Method of cleaning a semiconductor fabricating apparatus | Yong Woo Shin | 2002-08-20 |
| 6383953 | Apparatus for fabricating semiconductor device and method for fabricating semiconductor using the same | — | 2002-05-07 |
| 6338995 | High-permittivity dielectric capacitor for a semiconductor device and method for fabricating the same | Ki Bum Kim | 2002-01-15 |