Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472079 | Composition for film formation, method of film formation, and silica-based film | Eiji Hayashi, Kinji Yamada | 2002-10-29 |
| 6468589 | Composition for film formation and insulating film | Takashi Okada, Kinji Yamada | 2002-10-22 |
| 6465368 | Method of manufacturing insulating film-forming material, the insulating film-forming material, and insulating film | Yasutake Inoue, Junji Kawai, Kinji Yamada | 2002-10-15 |
| 6376634 | Composition for film formation and material for insulating film formation | Kinji Yamada, Mayumi Kakuta, Yasutake Inoue, Masahiko Ebisawa, Satoko Hakamatsuka +1 more | 2002-04-23 |