Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492613 | System for precision control of the position of an atmospheric plasma | Iskander Tokmouline | 2002-12-10 |
| 6467297 | Wafer holder for rotating and translating wafers | Iskander Tokmouline | 2002-10-22 |