Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403846 | Fluorinated, saturated hydrocarbons | Toshirou Yamada, Takashi Uruma, Tatsuya Sugimoto | 2002-06-11 |
| 6383403 | Dry etching method | Toshiro Yamada, Kuniaki Goto, Tetsuya Takagaki | 2002-05-07 |