Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483056 | Microfabricated relay with multimorph actuator and electrostatic latch mechanism | Mark Hyman, Peter Bogdanoff | 2002-11-19 |
| 6396368 | CMOS-compatible MEM switches and method of making | Lap-Wai Chow, Tsung-Yuan Hsu, Robert Y. Loo, Paul Ouyang, James H. Schaffner +2 more | 2002-05-28 |