Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465348 | Method of fabricating an MOCVD titanium nitride layer utilizing a pulsed plasma treatment to remove impurities | — | 2002-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465348 | Method of fabricating an MOCVD titanium nitride layer utilizing a pulsed plasma treatment to remove impurities | — | 2002-10-15 |