Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6335054 | Air lock for introducing substrates to and/or removing them from a treatment chamber | Helmut Grimm, Jurgen Henrich, Klaus Michael, Gert Rodling, Jürgen Ulrich | 2002-01-01 |