Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355979 | Hard mask for copper plasma etch | Peter Nunan | 2002-03-12 |
| 6339028 | Vacuum loadlock ultra violet bake for plasma etch | — | 2002-01-15 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355979 | Hard mask for copper plasma etch | Peter Nunan | 2002-03-12 |
| 6339028 | Vacuum loadlock ultra violet bake for plasma etch | — | 2002-01-15 |