Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6398964 | Process for treating aqueous waste containing copper and copper CMP particles | Michael Andrew Frisch, Deon Eugene Campbell, Thuy Khanh T. Nguyen, Dustin K. James | 2002-06-04 |