Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480320 | Microelectromechanical mirror and mirror array | — | 2002-11-12 |
| 6351996 | Hermetic packaging for semiconductor pressure sensors | David William Burns, Janusz Bryzek, Sean S. Cahill | 2002-03-05 |
| 6346742 | Chip-scale packaged pressure sensor | Janusz Bryzek, David William Burns, Sean S. Cahill | 2002-02-12 |