Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423615 | Silicon wafers for CMOS and other integrated circuits | Li Ling, Sing-Chung Hu | 2002-07-23 |
| 6406981 | Method for the manufacture of semiconductor devices and circuits | — | 2002-06-18 |
| 6387572 | Low CTE substrate for reflective EUV lithography | Tom X. Tong | 2002-05-14 |