Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455395 | Method of fabricating silicon structures including fixtures for supporting wafers | James E. Boyle, Robert L. Davis, Laurence D. Delaney | 2002-09-24 |
| 6450346 | Silicon fixtures for supporting wafers during thermal processing | James E. Boyle, Robert L. Davis, Laurence D. Delaney | 2002-09-17 |
| 6403914 | Method for welding silicon workpieces | Robert L. Davis, David B. Ackard, James W. Govorko | 2002-06-11 |
| 6357432 | Silicon support members for wafer processing fixtures | Robert L. Davis | 2002-03-19 |