Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6419567 | Retaining ring for chemical-mechanical polishing (CMP) head, polishing apparatus, slurry cycle system, and method | — | 2002-07-16 |
| 6375549 | Polishing head for wafer, and method for polishing | Lutz Teichgräber, David Weston Haggart, Jr., Katrin Ebner | 2002-04-23 |