Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486675 | In-situ method for measuring the endpoint of a resist recess etch process | Venkatachalam C. Jaiprakash | 2002-11-26 |
UM
Ulrich Mantz
Overall (2002): #96,907 of 266,432Top 40%
1
Patents 2002