Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6459296 | Method, system and method of using a component for setting the electrical characteristics of microelectronic circuit configurations | Oliver Gehring, Olaf Heitzsch | 2002-10-01 |
| 6447372 | Polishing agent for semiconductor substrates | Olaf Heitzsch | 2002-09-10 |
| 6337255 | Method for forming a trench structure in a silicon substrate | Olaf Heitzsch, Michael J. Schmidt | 2002-01-08 |