Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6371833 | Backing film for chemical mechanical planarization (CMP) of a semiconductor wafer | Kai Huckels | 2002-04-16 |
KH
Klaus Herlitz
Overall (2002): #262,861 of 266,432Top 100%
1
Patents 2002