Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458603 | Method of fabricating a micro-technical structure, and micro-technical component | Siegfried Schwarzl, Stefan Miethaner, Hermann Wendt | 2002-10-01 |
| 6413886 | Method for fabricating a microtechnical structure | Georg Schulze-Icking | 2002-07-02 |