Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6335260 | Method for improving the dimple phenomena of a polysilicon film deposited on a trench | Mao-Song Tseng, Rong-Ching Chen, Su-Wen Chang | 2002-01-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6335260 | Method for improving the dimple phenomena of a polysilicon film deposited on a trench | Mao-Song Tseng, Rong-Ching Chen, Su-Wen Chang | 2002-01-01 |